What is a MEMS oscillator?

A MEMS oscillator is an oscillator that generates a clock signal source that is essential for electronic devices that use MEMS structure oscillators. In the past, crystal devices were commonly used as oscillators, and crystal devices are still used in many cases today. This is an oscillator that utilizes a fused oscillator as a resonance point.

The principle of a MEMS oscillator is that the circuit is constructed using MEMS (microelectromechanical system) technology as the oscillator's resonator. This MEMS resonator is manufactured using thin-film microfabrication technology and is made of single-crystal silicon. This silicone has 14 times more tensile strength than titanium. During operation, the displacement of the vibrator is extremely small, and it vibrates extremely small relative to the gap between it and its surroundings.

Operating principle of MEMS resonator
MEMS resonators are driven by electrostatic excitation force, unlike crystal devices that are piezoelectrically driven by the piezoelectric effect. By electrically connecting the MEMS-dedicated oscillation circuit and the MEMS resonator, the circuit that maintains oscillation is activated. This allows the MEMS resonator to be mechanically fixed at a specific frequency and vibrated.

Features and benefits
High-strength material: MEMS resonators are made of single-crystal silicon, which has extremely high tensile strength.
Microvibration: The displacement of vibration is extremely small, allowing precise vibration control.
Flexibility in frequency setting: Compared to crystal oscillators, using a PLL (Phase Locked Loop) allows you to set the frequency freely.

Disadvantages and challenges
Increased power consumption: Due to the complexity of the circuit configuration, power consumption may increase.
Deterioration of noise characteristics: There is a problem that noise characteristics tend to deteriorate due to frequency jumps.

comparison
Compared to crystal oscillators, MEMS oscillators have a higher degree of freedom in design and have superior material strength. However, there are challenges in circuit complexity and noise characteristics. It is important to understand these characteristics and choose appropriately according to the application.

Application of MEMS oscillator

MEMS oscillators are widely used in a variety of electronic devices that require timing and clock signals. Specifically, they are used in mobile phones, computers, wearable devices, connected devices for cars, medical equipment, etc. In recent years, as line speeds have improved with the introduction of 5G and the Internet of Things (IoT) has become more widespread, the markets for autonomous driving and VR devices are expanding. As a result, demand for MEMS oscillators is expected to increase significantly in the future.

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