What is a Vacuum gauge?

A vacuum gauge is a sensor for measuring the degree of vacuum in a certain space. Depending on the purpose, select either a partial pressure vacuum gauge or a full pressure vacuum gauge. In addition, there are many different measurement methods, and the range of vacuum that can be measured differs depending on the difference.

Application of Vacuum gauge

Since impurities including moisture are extremely reduced in the vacuum space, the vacuum space is often used at manufacturing sites where high cleanliness is required. Among them, the vacuum gauge is installed in a fluid circuit connected to a chamber or quartz tube that requires vacuum achievement control. Vacuum gauges are often installed in plasma etching spaces for semiconductor manufacturing equipment and in experimental equipment such as metallurgy and organic synthesis. It is also used in situations where surface cleanliness is required, such as for processing the surface of objects such as ion beam devices and thin film deposition devices.

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