What is a X-ray microscope?

An X-ray microscope can observe the structure of an object using X-rays as a light source. Generally, in a microscope that uses electromagnetic waves, the spatial resolution depends on the wavelength. X-rays have a wavelength 100 to 10000 times shorter than that of visible light, and can acquire fine images. In addition, X-rays are highly transparent, and when they pass through a substance, they are attenuated uniquely to the internal structure, thickness, and composition, which makes it possible to obtain images with contrast. In addition, it is possible to acquire a tomographic image (so-called CT) by 3D reconstructing continuously acquired images while rotating the sample.

Application of X-ray microscope

It is mainly used for inspection in the industrial field. Since non-contact and non-destructive inspection can be performed using X-rays, it is used when inspecting defects and characteristics of parts. In addition, it is possible to evaluate the structure of rocks and acquire parameters for evaluating the characteristics of new raw materials. Also, in the field of semiconductor manufacturing, it is often used to evaluate the characteristics of products that have undergone ultra-fine processing. When observing a biological sample containing a large amount of water, a high-contrast image can be obtained by using the X-ray wavelength region where water absorption is low.

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