What is a Positioning stage?

The positioning stage is the stage part that is the moving body of the positioning device that has a structure that combines a motor and a ball screw, and the position can be determined by moving the parts to the target position of the stage. Since it can perform precise positioning, it is used in various applications in the field of precision processing, including manufacturing and inspection of semiconductors and displays. The XY stage can be used for various purposes, such as being able to move freely in two dimensions, depending on the type of stage.

Application of Positioning stage

Positioning stages are used as moving objects in positioning equipment for positioning in the field of precision equipment. By precisely moving the stage to the target position in resolution units, it is possible to achieve the standard as designed. Types of stages include a two-axis orthogonal type called the XY stage, a three-axis orthogonal type called the XYZ stage with vertical motion added to the XY stage, and an XY-Θ type stage with rotational motion added to the two-dimensional plane. I have. Specifically, it is used in fields such as semiconductors and printed circuit boards, as well as in liquid crystal inspection equipment, laser-related equipment, substrate-related equipment, various transfer equipment, and precision inspection equipment.

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