What is a Pirani vacuum gauge?

A Pirani vacuum gauge is a device used to measure pressure in low vacuum ranges based on the principle of thermal conductivity. It works by utilizing a heated filament (resistance wire) placed within the sensor. As gas molecules cool the filament, the cooling effect decreases with reduced pressure because there are fewer gas molecules to carry away the heat. This causes changes in the filament’s temperature and resistance, which are then converted into an electrical signal to determine the vacuum level. Pirani vacuum gauges are suitable for measuring pressures in the low to medium vacuum range (approximately 1000 Pa to 0.1 Pa) and are widely used in semiconductor manufacturing, vacuum equipment maintenance, and research and development industries.

Application of Pirani vacuum gauge

✅Semiconductor Manufacturing
Used to monitor and control proper vacuum levels in semiconductor fabrication equipment to maintain precise manufacturing conditions.
✅Vacuum Equipment Maintenance
Measures pressure in vacuum pumps and chambers to ensure that systems are functioning correctly and efficiently.
✅Research and Development
Applied in laboratories and universities to create controlled low vacuum environments for physics or chemistry experiments.
✅Coating Technology
Used in vacuum deposition and sputtering systems to accurately monitor and maintain vacuum levels during the coating process.

※Includes information on some trading companies