What is a Ellipsometer?

Ellipsometer (English: Ellipsometer) is a device for measuring the thickness of thin films and optical constants of substances in a non-contact and non-destructive manner using optical characteristics. In Japanese, it is called an elliptical polarization analyzer. The optical normal number of the measurement target is quantified by shining light from the light source at an angle to the measurement target, receiving the reflected light with the sensor, and measuring the change in the polarization state. Generally called ellipso, the spectroscopic ellipsometer is the correct name. Measurement is not possible if the impermeable film that does not transmit light or if the surface is rough and does not reflect sufficiently.

Application of Ellipsometer

The main applications are the measurement of optical constants and the measurement of film thickness based on them. Since the reflected polarization is measured, it is not possible to measure an object with a very thick thickness (about 1 mm or less), but since some devices have a resolution of 0.01 nm scale for thin films, the thickness of the thin film is highly accurate. It is often used for measuring. It is possible to measure after thin film formation in the semiconductor manufacturing process, various coatings, optical characteristics of optical films such as lenses, crystallization rate, composition, optical anisotropy, etc. of the substances that make up the film. Depending on the device, the optical characteristics of the liquid can also be measured.

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